Patent Assignment
Reel/Frame 013401/0167
Assignment of Assignor's Interest
Recorded: 2002-10-15
Received: 2002-10-24
Pages: 3
Assignor
NAGAMURA, YOSHIKAZU
Executed: 2002-09-10
Assignee
MITSUBISHI DENKI KABUSHIKI KAISHA
2-3, MARUNOUCHI 2-CHOME, CHIYODA-KU, TOKYO 100-8310, JPX, JAPAN
Covered Property
(1)
Sensitivity Adjusting Method for Pattern Inspection Apparatus
Application:
10/269,876 →