Patent Assignment
Reel/Frame 013408/0084
Assignment of Assignor's Interest
Recorded: 2002-10-07
Pages: 3
Assignors
ZHENG, YI
Executed: 2002-10-02
NEMANI, SRINIVAS D.
Executed: 2002-10-02
XIA, LI-QUN
Executed: 2002-10-02
Assignee
APPLIED MATERIALS, INC.
P.O. BOX 450-A, SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Two-Layer Film for Next Generation Damascene Barrier Application with Good Oxidation Resistance