Patent Assignment
Reel/Frame 013421/0165
Assignment of Assignor's Interest
Recorded: 2002-10-23
Received: 2002-10-30
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107, JPX, JAPAN
Covered Property
(1)
Apparatus and method for use of optical system with a plasma processing system
Application:
60/414,348 →