IP Library › Patent Application 60414348
Patent Application Provisional
App. No. 60/414,348 · Confirmation No. 3307

Apparatus and method for use of optical system with a plasma processing system

Provisional Application Expired
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 Code Description Pages PDF
2002-09-30 TRNA Transmittal of New Application 2 View
2002-09-30 SPEC Specification 18 View
2002-09-30 CLM Claims 10 View
2002-09-30 ABST Abstract 1 View
2002-09-30 DRW Drawings-only black and white line drawings 6 View
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Quick Facts
App. No.
60/414,348
Filed
2002-09-30