Patent Assignment
Reel/Frame 013815/0434
Corrective Assignment to Correct the Last Name of the Second Inventor. Prevously Recorded on Reel 013421 Frame 00165.
Recorded: 2003-03-04
Received: 2003-03-10
Pages: 4
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107, JPX, JAPAN
Covered Property
(1)
Apparatus and method for use of optical system with a plasma processing system
Application:
60/414,348 →