Patent Assignment
Reel/Frame 013431/0700
Assignment of Assignor's Interest
Recorded: 2002-10-25
Pages: 3
Assignors
REN, DAXING
Executed: 2002-09-30
HUBACEK, JEROME S.
Executed: 2002-09-27
WEBB, NICHOLAS E.
Executed: 2002-09-30
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Silicon Parts Having Reduced Metallic Impurity Concentration for Plasma Reaction Chambers