Patent Assignment
Reel/Frame 013441/0027
Assignment of Assignor's Interest
Recorded: 2002-10-28
Pages: 2
Assignor
SUGIURA, SATOSHI
Executed: 2002-10-21
Assignee
CANON KABUSHIKI KAISHA
3-30-2, SHIMOMARUKO, OHTA-KU, TOKYO, JAPAN
Covered Property
(1)
Lithography System, Exposure Apparatus and Their Control Method, and Device Manufacturing Method