Patent Assignment
Reel/Frame 013454/0494
Assignment of Assignor's Interest
Recorded: 2002-10-30
Pages: 3
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
121 PARK AVE. 3, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, R.O.C., TAIWAN
Covered Property
(1)
Metal Barrier Integrity via Use of a Novel Two Step Pvd-Ald Deposition Procedure