Patent Assignment
Reel/Frame 013464/0227
Assignment of Assignor's Interest
Recorded: 2002-11-05
Pages: 7
Assignors
MIEHER, WALTER
Executed: 2002-10-04
DZIURA, THADDEUS G.
Executed: 2002-10-04
LEVY, ADY
Executed: 2002-10-07
MACK, CHRIS A.
Executed: 2002-10-28
Assignee
KLA-TENCOR TECHNOLOGIES CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Method for Determining Lithographic Focus and Exposure