Confirmatory License

Recorded: 2002-11-07 Received: 2002-11-13 Pages: 3

Assignor

CALIFORNIA, UNIVERSITY OF

Executed: 2001-04-20

Assignee

U.S. DEPARTMENT OF ENERGY

1000 INDEPENDENCE AVENUE, S.W., WASHINGTON, DC, 20585-0162, UNITED STATES

Covered Property (1)

Combined Plasma/Liquid Cleaning of Substrates

Application: 09/803,065 →