IP Library › Granted Patent US 6,546,938
Granted Patent Utility
US 6,546,938 · Confirmation No. 7211

COMBINED PLASMA/LIQUID CLEANING OF SUBSTRATES

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 Code Description Pages PDF
2013-08-20 OATH Oath or Declaration filed 4 View
2001-03-08 TRNA Transmittal of New Application 3 View
2001-03-08 SPEC Specification 13 View
2001-03-08 CLM Claims 4 View
2001-03-08 ABST Abstract 1 View
2001-03-08 DRW Drawings-only black and white line drawings 2 View
2001-03-08 OATH Oath or Declaration filed 2 View
2001-03-08 TRNA Transmittal of New Application 3 View
2001-03-08 SPEC Specification 13 View
2001-03-08 CLM Claims 4 View
2001-03-08 ABST Abstract 1 View
2001-03-08 DRW Drawings-only black and white line drawings 2 View
2001-03-08 OATH Oath or Declaration filed 2 View
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Quick Facts
Patent No.
US 6,546,938
App. No.
09/803,065
Filed
2001-03-08
Granted
2003-04-15
Pub. No.
US20020134403A1
Art Unit
1746
PTA
-41 days