Patent Assignment
Reel/Frame 013478/0861
Assignment of Assignor's Interest
Recorded: 2002-11-08
Pages: 2
Assignee
CANON KABUSHIKI KAISHA
3-30-2, SHIMOMARUKO, OHTA-KU, TOKYO, JAPAN
Covered Property
(1)
Position Detection Apparatus, Alignment Apparatus and Methods Therefor, and Exposure Apparatus and Device Manufacturing Method