Assignment of Assignor's Interest

Recorded: 2002-11-05 Pages: 4

Assignors

LIU, LIANJUN

Executed: 2002-09-25

JOHNSON, WAYNE L.

Executed: 2002-09-14

Assignee

TOKYO ELECTRON LIMITED

3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107, JAPAN

Covered Property (1)

Optical Monitoring and Control System and Method for Plasma Reactors

Patent: 7,462,335 →

Application: 10/259,845 →

Publication: US 2003/0038112