Patent Assignment
Reel/Frame 013483/0226
Assignment of Assignor's Interest
Recorded: 2002-11-13
Pages: 4
Assignee
MICRON TECHNOLOGY, INC.
8000 SOUTH FEDERAL WAY, BOISE, IDAHO, 83716-9632
Covered Property
(1)
Atomic Layer Deposited Hfsion Dielectric Films Wherein Each Precursor Is Independendently Pulsed
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.