Patent Assignment
Reel/Frame 013483/0610
Assignment of Assignor's Interest
Recorded: 2002-11-01
Pages: 3
Assignors
CHEN, XIAOYI
Executed: 2002-10-16
YING, CHENTSAU
Executed: 2002-10-16
NALLAN, PADMAPANI C.
Executed: 2002-10-16
KUMAR, AJAY
Executed: 2002-10-16
KERNS, RALPH C.
Executed: 2002-11-01
RUI, YING
Executed: 2002-10-31
YAN, CHUN
Executed: 2002-10-16
DING, GUOWEN
Executed: 2002-10-16
YAU, WAI-FAN
Executed: 2002-10-16
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, P.O. BOX 450A, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Method for Removal of Metallic Residue After Plasma Etching of a Metal Layer