Patent Assignment
Reel/Frame 013487/0345
Assignment of Assignor's Interest
Recorded: 2002-11-12
Pages: 5
Assignors
LARSON, ROBERT E.
Executed: 2002-11-12
SIMONDET, SEAN D.
Executed: 2002-11-08
ZIMMERMAN, DAVID C.
Executed: 2002-11-08
MACIEJ, TODD K.
Executed: 2002-11-08
MATTHYS, QUIRIN W.
Executed: 2002-11-08
Assignee
FSI INTERNATIONAL, INC.
3455 LYMAN BOULEVARD, CHASKA, MINNESOTA, 55318
Covered Property
(1)
Reduced Footprint Tool for Automated Processing of Microelectronic Substrates