Patent Assignment
Reel/Frame 013503/0110
Assignment of Assignor's Interest
Recorded: 2002-11-15
Pages: 3
Assignee
ECO-SNOW SYSTEMS, INC.
4935A SOUTHFRONT ROAD, LIVERMORE, CALIFORNIA, 94550
Covered Property
(1)
Post-CMP cleaning of semiconductor wafer surfaces using a combination of aqueous and CO2 based cryogenic cleaning techniques
Application:
10/215,859 →
Publication:
US 2004/0029494
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.