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App. No. 10/215,859 · Confirmation No. 7545

Post-CMP cleaning of semiconductor wafer surfaces using a combination of aqueous and CO2 based cryogenic cleaning techniques

Abandoned -- Failure to Respond to an Office Action View Publication ↗
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2008-06-25 ABN Abandonment 2 View
2008-03-06 EXIN Examiner Interview Summary Record (PTOL - 413) 4 View
2007-12-06 CTFR Final Rejection 2 View
2007-12-06 CTFR Final Rejection 5 View
2007-12-06 SRFW Search information including classification, databases and other search related notes 1 View
2007-10-29 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2007-10-29 CLM Claims 3 View
2007-10-29 REM Applicant Arguments/Remarks Made in an Amendment 5 View
2007-10-29 AF/D Affidavit-submitted prior to Mar 15, 2013 3 View
2007-10-29 XT/ Extension of Time 1 View
2007-10-29 WFEE Fee Worksheet (SB06) 2 View
2007-10-29 N417 Electronic Filing System Acknowledgment Receipt 2 View
2007-10-29 LET. Miscellaneous Incoming Letter 1 View
2007-10-28 WFEE Fee Worksheet (SB06) 1 View
2007-07-16 CTNF Non-Final Rejection 7 View
2007-07-16 1449 List of References cited by applicant and considered by examiner 1 View
2007-07-16 SRFW Search information including classification, databases and other search related notes 1 View
2007-06-05 WFEE Fee Worksheet (SB06) 1 View
2007-05-31 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2007-05-31 CLM Claims 3 View
2007-05-31 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2007-05-31 RCEX Request for Continued Examination (RCE) 2 View
2007-05-31 XT/ Extension of Time 1 View
2007-05-31 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2007-05-31 WFEE Fee Worksheet (SB06) 2 View
2007-05-31 N417 Electronic Filing System Acknowledgment Receipt 3 View
2007-05-31 LET. Miscellaneous Incoming Letter 1 View
2006-12-21 CTFR Final Rejection 8 View
2006-12-21 SRFW Search information including classification, databases and other search related notes 1 View
2006-11-01 DISQ Terminal Disclaimer review decision 1 View
2006-10-19 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2006-10-19 CLM Claims 4 View
2006-10-19 REM Applicant Arguments/Remarks Made in an Amendment 14 View
2006-10-19 XT/ Extension of Time 1 View
2006-10-19 LET. Miscellaneous Incoming Letter 1 View
2006-10-19 AF/D Affidavit-submitted prior to Mar 15, 2013 6 View
2006-10-19 DIST Terminal Disclaimer Filed 2 View
2006-10-19 WFEE Fee Worksheet (SB06) 1 View
2006-10-19 WFEE Fee Worksheet (SB06) 1 View
2006-06-15 CTNF Non-Final Rejection 7 View
2006-06-15 SRFW Search information including classification, databases and other search related notes 1 View
2006-05-17 WFEE Fee Worksheet (SB06) 1 View
2006-03-29 RCEX Request for Continued Examination (RCE) 30 View
2006-03-29 XT/ Extension of Time 1 View
2006-03-29 LET. Miscellaneous Incoming Letter 1 View
2006-03-29 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2006-03-02 CTAV Advisory Action (PTOL-303) 2 View
2006-02-21 A.NE Response After Final Action 1 View
2006-02-21 SPEC Specification 2 View
2006-02-21 REM Applicant Arguments/Remarks Made in an Amendment 19 View
2006-02-21 DRW Drawings-only black and white line drawings 1 View
2006-02-21 AF/D Affidavit-submitted prior to Mar 15, 2013 5 View
2006-02-21 LET. Miscellaneous Incoming Letter 1 View
2006-02-21 XT/ Extension of Time 1 View
2005-11-09 CTFR Final Rejection 8 View
2005-11-09 892 List of references cited by examiner 1 View
2005-11-09 FWCLM Index of Claims 1 View
2005-11-09 SRFW Search information including classification, databases and other search related notes 1 View
2005-09-08 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2005-09-08 SPEC Specification 2 View
2005-09-08 CLM Claims 3 View
2005-09-08 REM Applicant Arguments/Remarks Made in an Amendment 12 View
2005-09-08 WFEE Fee Worksheet (SB06) 1 View
2005-07-08 CTNF Non-Final Rejection 6 View
2005-07-08 892 List of references cited by examiner 1 View
2005-07-08 FWCLM Index of Claims 1 View
2005-07-08 SRFW Search information including classification, databases and other search related notes 1 View
2005-04-18 RCEX Request for Continued Examination (RCE) 1 View
2005-04-18 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2005-04-18 SPEC Specification 3 View
2005-04-18 CLM Claims 3 View
2005-04-18 REM Applicant Arguments/Remarks Made in an Amendment 12 View
2005-04-18 DRW Drawings-only black and white line drawings 2 View
2005-04-18 XT/ Extension of Time 1 View
2005-04-18 LET. Miscellaneous Incoming Letter 1 View
2005-04-18 WFEE Fee Worksheet (SB06) 1 View
2004-12-21 CTFR Final Rejection 10 View
2004-12-21 1449 List of References cited by applicant and considered by examiner 3 View
2004-12-21 892 List of references cited by examiner 1 View
2004-12-21 SRFW Search information including classification, databases and other search related notes 1 View
2004-12-21 FWCLM Index of Claims 1 View
2004-10-19 WFEE Fee Worksheet (SB06) 1 View
2004-07-09 LET. Miscellaneous Incoming Letter 2 View
2004-07-09 XT/ Extension of Time 1 View
2004-07-09 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2004-07-09 SPEC Specification 9 View
2004-07-09 ABST Abstract 1 View
2004-07-09 CLM Claims 3 View
2004-07-09 REM Applicant Arguments/Remarks Made in an Amendment 8 View
2004-07-09 WFEE Fee Worksheet (SB06) 1 View
2004-03-11 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2004-02-13 CTNF Non-Final Rejection 5 View
2004-02-13 892 List of references cited by examiner 1 View
2004-02-13 1449 List of References cited by applicant and considered by examiner 3 View
2004-02-10 CTMS Miscellaneous Action with shortened statutory period (SSP) 3 View
2004-01-02 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2003-11-25 LET. Miscellaneous Incoming Letter 1 View
2003-11-25 PA.. Power of Attorney 4 View
2003-10-14 STATUS.LET Request for status of Application 2 View
2003-06-25 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2003-06-09 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2002-12-02 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2002-11-15 PEFR Applicant Response to Pre-Exam Formalities Notice 4 View
2002-11-15 DRW Drawings-only black and white line drawings 2 View
2002-11-15 OATH Oath or Declaration filed 3 View
2002-11-15 TRNA Transmittal of New Application 4 View
2002-11-15 DRW Drawings-only black and white line drawings 2 View
2002-11-15 OATH Oath or Declaration filed 3 View
2002-10-01 CFILE Request for Corrected Filing Receipt 3 View
2002-09-17 PEFN Pre-Exam Formalities Notice 2 View
2002-08-09 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2002-08-09 SRFW Search information including classification, databases and other search related notes 1 View
2002-08-09 FWCLM Index of Claims 1 View
2002-08-09 TRNA Transmittal of New Application 4 View
2002-08-09 DRW Drawings-only black and white line drawings 2 View
2002-08-09 SPEC Specification 12 View
2002-08-09 CLM Claims 3 View
2002-08-09 ABST Abstract 1 View
2002-08-09 OATH Oath or Declaration filed 3 View
2002-08-09 WFEE Fee Worksheet (SB06) 1 View
2002-08-09 WFEE Fee Worksheet (SB06) 1 View
2002-08-09 TRNA Transmittal of New Application 4 View
2002-08-09 SPEC Specification 12 View
2002-08-09 CLM Claims 3 View
2002-08-09 ABST Abstract 1 View
2002-08-09 DRW Drawings-only black and white line drawings 2 View
2002-08-09 OATH Oath or Declaration filed 3 View
2002-08-09 LET. Miscellaneous Incoming Letter 1 View
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Quick Facts
App. No.
10/215,859
Filed
2002-08-09
Pub. No.
US20040029494A1
Art Unit
3723