Patent Assignment
Reel/Frame 013511/0205
Assignment of Assignor's Interest
Recorded: 2002-11-20
Received: 2002-11-26
Pages: 2
Assignors
SHIRAISHI, HIROSHI
Executed: 2001-02-26
TANAKA, TOSHIHIKO
Executed: 2001-02-26
SATOH, HIDETOSHI
Executed: 2001-02-27
HASEGAWA, NORIO
Executed: 2001-02-28
Assignee
HITACHI, LTD.
6, KANDA SURUGADAI 4-CHOME, CHIYODA-KU, TOKYO, JPX, JAPAN
Covered Property
(1)
Electron Device Manufacturing Method, a Pattern Forming Method, and a Photomask Used for Those Methods
Application:
09/810,194 →