Granted Patent
Utility
US 6,653,052
· Confirmation No. 8175
ELECTRON DEVICE MANUFACTURING METHOD, A PATTERN FORMING METHOD, AND A PHOTOMASK USED FOR THOSE METHODS
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-09-26 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2003-09-26 | DRW |
Drawings-only black and white line drawings | 8 | View | |
| 2003-09-26 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2001-03-19 | TRNA |
Transmittal of New Application | 1 | View | |
| 2001-03-19 | SPEC |
Specification | 83 | View | |
| 2001-03-19 | CLM |
Claims | 4 | View | |
| 2001-03-19 | ABST |
Abstract | 1 | View | |
| 2001-03-19 | DRW |
Drawings-only black and white line drawings | 27 | View | |
| 2001-03-19 | OATH |
Oath or Declaration filed | 4 | View | |
| 2001-03-19 | TRNA |
Transmittal of New Application | 1 | View | |
| 2001-03-19 | SPEC |
Specification | 83 | View | |
| 2001-03-19 | CLM |
Claims | 4 | View | |
| 2001-03-19 | ABST |
Abstract | 1 | View | |
| 2001-03-19 | DRW |
Drawings-only black and white line drawings | 27 | View | |
| 2001-03-19 | OATH |
Oath or Declaration filed | 4 | View |
Inventors
Toshihiko Tanaka
Tokyo, JAPAN
Norio Hasegawa
Nishitama, JAPAN
Hiroshi Shiraishi
Hachioji, JAPAN
Hidetoshi Satoh
Kodaira, JAPAN
Attorneys & Agents of Record
Classification
USPC
430/311
G03F1/30
Prosecution
- Examiner
- SAGAR, KRIPA
- Art Unit
- 1756
- Customer No.
- 24956
- Docket No.
- NIT-269
- Confirmation No.
- 8175
Foreign Priority
2000-128944
·
2000-04-25
·
JAPAN
Publication
- Pub. No.
- US20010033995A1
- Pub. Date
- 2001-10-25
Patent Term Adjustment
-63days
CHANGE OF ADDRESS
Recorded 2017-11-29
MERGER AND CHANGE OF NAME
Recorded 2010-09-02
from
HITACHI, LTD.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2003-10-15
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-11-20
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Quick Facts
- Patent No.
- US 6,653,052
- App. No.
- 09/810,194
- Filed
- 2001-03-19
- Granted
- 2003-11-25
- Pub. No.
- US20010033995A1
- Examiner
- SAGAR, KRIPA
- Art Unit
- 1756
- PTA
- -63 days
External Links