IP Library Granted Patent US 6,653,052
Granted Patent Utility
US 6,653,052 · Confirmation No. 8175

ELECTRON DEVICE MANUFACTURING METHOD, A PATTERN FORMING METHOD, AND A PHOTOMASK USED FOR THOSE METHODS

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Code Description Pages PDF
2003-09-26 LET. Miscellaneous Incoming Letter 1 View
2003-09-26 DRW Drawings-only black and white line drawings 8 View
2003-09-26 IFEE Issue Fee Payment (PTO-85B) 1 View
2001-03-19 TRNA Transmittal of New Application 1 View
2001-03-19 SPEC Specification 83 View
2001-03-19 CLM Claims 4 View
2001-03-19 ABST Abstract 1 View
2001-03-19 DRW Drawings-only black and white line drawings 27 View
2001-03-19 OATH Oath or Declaration filed 4 View
2001-03-19 TRNA Transmittal of New Application 1 View
2001-03-19 SPEC Specification 83 View
2001-03-19 CLM Claims 4 View
2001-03-19 ABST Abstract 1 View
2001-03-19 DRW Drawings-only black and white line drawings 27 View
2001-03-19 OATH Oath or Declaration filed 4 View
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Quick Facts
Patent No.
US 6,653,052
App. No.
09/810,194
Filed
2001-03-19
Granted
2003-11-25
Pub. No.
US20010033995A1
Examiner
SAGAR, KRIPA
Art Unit
1756
PTA
-63 days