Granted Patent
Utility
US 6,750,000
· Confirmation No. 8279
ELECTRON DEVICE MANUFACTURING METHOD, A PATTERN FORMING METHOD, AND A PHOTOMASK USED FOR THOSE METHODS
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Code | Description | Pages | ||
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| 2004-05-03 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2004-02-03 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 3 | View | |
| 2004-02-03 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 4 | View | |
| 2004-02-03 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2004-02-03 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2004-02-03 | FWCLM |
Index of Claims | 1 | View | |
| 2004-02-03 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2004-02-03 | DRW |
Drawings-only black and white line drawings | 1 | View | |
| 2004-01-23 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2003-09-29 | TRNA |
Transmittal of New Application | 5 | View | |
| 2003-09-29 | SPEC |
Specification | 82 | View | |
| 2003-09-29 | CLM |
Claims | 4 | View | |
| 2003-09-29 | ABST |
Abstract | 1 | View | |
| 2003-09-29 | DRW |
Drawings-only black and white line drawings | 27 | View | |
| 2003-09-29 | OATH |
Oath or Declaration filed | 4 | View | |
| 2003-09-29 | A.PE |
Preliminary Amendment | 1 | View | |
| 2003-09-29 | SPEC |
Specification | 1 | View | |
| 2003-09-29 | CLM |
Claims | 4 | View | |
| 2003-09-29 | REM |
Applicant Arguments/Remarks Made in an Amendment | 1 | View | |
| 2003-09-29 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 2 | View | |
| 2003-09-29 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2003-09-29 | WFEE |
Fee Worksheet (SB06) | 1 | View |
Inventors
Toshihiko Tanaka
Tokyo, JAPAN
Norio Hasegawa
Nishitama, JAPAN
Hiroshi Shiraishi
Hachioji, JAPAN
Hidetoshi Satoh
Kodaira, JAPAN
Attorneys & Agents of Record
Classification
USPC
430/394
G03F1/30
Prosecution
- Examiner
- SAGAR, KRIPA
- Art Unit
- 1756
- Customer No.
- 24956
- Docket No.
- NIT-269-02
- Confirmation No.
- 8279
Foreign Priority
2000-128944
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2000-04-25
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JAPAN
Publication
- Pub. No.
- US20040043307A1
- Pub. Date
- 2004-03-04
Patent Term Adjustment
0days
CHANGE OF ADDRESS
Recorded 2017-11-29
MERGER AND CHANGE OF NAME
Recorded 2010-09-02
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Quick Facts
- Patent No.
- US 6,750,000
- App. No.
- 10/671,666
- Filed
- 2003-09-29
- Granted
- 2004-06-15
- Pub. No.
- US20040043307A1
- Examiner
- SAGAR, KRIPA
- Art Unit
- 1756
- PTA
- 0 days
External Links