Patent Assignment
Reel/Frame 013537/0511
Assignment of Assignor's Interest
Recorded: 2002-11-29
Pages: 3
Assignor
TANAKA, KOICHIRO
Executed: 2002-11-19
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398 HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Laser Beam Irradiating Apparatus, Laser Beam Irradiating Method, and Method of Manufacturing a Semiconductor Device