Patent Assignment
Reel/Frame 013539/0764
Assignment of Assignor's Interest
Recorded: 2002-12-02
Received: 2002-12-05
Pages: 5
Assignors
BARTHOLOMEW, LAWRENCE D.
Executed: 2002-10-15
PARK, SEUNG G.
Executed: 2002-10-15
YUH, SOON K.
Executed: 2002-10-15
BAILEY, ROBERT J.
Executed: 2002-11-15
Assignee
ASML US, INC.
440 KINGS VILLAGE ROAD, SCOTTS VALLEY, CA, 95066, UNITED STATES
Covered Property
(1)
Atmospheric Pressure Wafer Processing Reactor Having an Internal Pressure Control System and Method
Application:
10/226,773 →