Patent Assignment
Reel/Frame 013568/0822
Assignment of Assignor's Interest
Recorded: 2003-04-07
Pages: 5
Assignee
APPLIED MATERIALS, INC.
P.O. BOX 450-A, PATENT COUNSEL, M/S 2061, SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Method and Apparatus Employing Integrated Metrology for Improved Dielectric Etch Efficiency
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.