Patent Assignment
Reel/Frame 013568/0986
Assignment of Assignor's Interest
Recorded: 2003-04-08
Pages: 11
Assignors
MOGHADAM, FARHAD K.
Executed: 2003-03-21
COX, MICHAEL S.
Executed: 2003-04-03
KRISHNARAJ, PADMANABHAN
Executed: 2003-03-20
PHAM, THANH N.
Executed: 2003-03-20
CUI, ZHENJIANG
Executed: 2003-04-03
Assignee
APPLIED MATERIALS, INC.
P.O. BOX 450A, LEGAL AFFAIRS DEPARTEMNT, SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Deposition Process for High Aspect Ratio Trenches