Patent Assignment
Reel/Frame 013586/0114
Assignment of Assignor's Interest
Recorded: 2002-12-13
Pages: 5
Assignors
LARSON, DEAN J.
Executed: 2002-12-02
KADKHODAYAN, BABAK
Executed: 2002-12-02
WU, DI
Executed: 2002-12-02
TAKESHITA, KENJI
Executed: 2002-12-05
YEN, BI-MING
Executed: 2002-12-10
SU, XINGCAI
Executed: 2002-12-02
DENTY JR., WILLIAM M.
Executed: 2002-12-01
LOEWENHARDT, PETER
Executed: 2002-12-02
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Gas Distribution System with Tuning Gas