Patent Assignment
Reel/Frame 013590/0968
Assignment of Assignor's Interest
Recorded: 2002-12-23
Pages: 2
Assignee
ASM MICROCHEMISTRY OY
KUTOJANTIE 2B 02630, ESPOO, FINLAND
Covered Property
(1)
Metal Nitride Deposition by Ald with Reduction Pulse
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.