Patent Assignment
Reel/Frame 013592/0362
Assignment of Assignor's Interest
Recorded: 2002-12-19
Pages: 3
Assignee
SAMSUNG ELECTRONICS CO., LTD.
416, MAETAN-DONG, PALDAL-GU, SUWON-CITY, KYOUNGGI-DO, KOREA, REPUBLIC OF
Covered Property
(1)
Pressure Control Apparatus and Method of Establshing a Desired Level of Pressure Within at Least One Processing Chamber
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.