Patent Assignment
Reel/Frame 013596/0059
Assignment of Assignor's Interest
Recorded: 2002-12-18
Pages: 3
Assignors
CHENG, YI-LUNG
Executed: 2002-09-26
LIAO, MIAO-CHENG
Executed: 2002-09-26
TSAI, ERIC
Executed: 2002-09-26
WU, SZU-AN
Executed: 2002-09-26
WANG, YING-LANG
Executed: 2002-09-26
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO. LTD.
NO. 121 PARK AVENUE 3, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, R.O.C., TAIWAN
Covered Property
(1)
Bypass Gas Feed System and Method to Improve Reactant Gas Flow and Film Deposition