Patent Assignment
Reel/Frame 013598/0034
Assignment of Assignor's Interest
Recorded: 2002-12-16
Received: 2002-12-26
Pages: 2
Assignee
ASML US, INC.
541 E. TRIMBLE ROAD, SAN JOSE, CA, 95131, UNITED STATES
Covered Property
(1)
Wafer Track Apparatus and Methods for Dispensing Fluids with Rotatable Dispense Arms
Application:
10/320,994 →