IP Library Granted Patent US 6,770,424
Granted Patent Utility
US 6,770,424 · Confirmation No. 3024

WAFER TRACK APPARATUS AND METHODS FOR DISPENSING FLUIDS WITH ROTATABLE DISPENSE ARMS

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Quick Facts
Patent No.
US 6,770,424
App. No.
10/320,994
Filed
2002-12-16
Granted
2004-08-03
Pub. No.
US20040115567A1
Art Unit
1752
PTA
-4 days