Patent Assignment
Reel/Frame 013606/0506
Assignment of Assignor's Interest
Recorded: 2002-12-26
Pages: 3
Assignors
KAMP, TOM A.
Executed: 2002-09-25
MILLER, ALAN J.
Executed: 2002-10-07
VENUGOPAL, VIJAYAKUMAR C.
Executed: 2002-09-25
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Apparatus and Method for Controlling Etch Depth