Patent Assignment
Reel/Frame 013618/0498
Assignment of Assignor's Interest
Recorded: 2002-12-27
Pages: 3
Assignee
CARL ZEISS SEMICONDUCTOR
MANUFACTURING TECHNOLOGIES AG, CARL-ZEISS-STRASSE 22, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Lithographic Objective Having a First Lens Group Including Only Lenses Having a Positive Refractive Power
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.