Patent Assignment
Reel/Frame 013621/0870
Assignment of Assignor's Interest
Recorded: 2002-12-23
Pages: 2
Assignee
DAINIPPON SCREEN MFG. CO., LTD.
1-1 TENJINKITAMACHI TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIKYO-KU KYOTO 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.