Patent Assignment
Reel/Frame 013623/0279
Assignment of Assignor's Interest
Recorded: 2002-12-20
Pages: 3
Assignor
RUSSELL, DERREK ANDREW
Executed: 2002-12-16
Assignee
TOKYO ELECTRON LIMITED
TBS BROADCAST CENTER, 3-6 AKASAKA 5-CHOME MINATO-KU, TOKYO 107, JAPAN
Covered Property
(1)
Method, Apparatus and Magnet Assembly for Enhancing and Localizing a Capacitively Coupled Plasma