Assignment of Assignor's Interest

Recorded: 2002-12-26 Received: 2003-01-08 Pages: 2

Assignors

HASHIMOTO, SHIN-ICHI

Executed: 2002-12-11

MURAKI, MASATO

Executed: 2002-12-11

OHTA, HIROYA

Executed: 2002-12-11

Assignees

CANON KABUSHIKI KAISHA

30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, JPX, JAPAN

HITACHI, LTD.

6, KANDA SURUGADAI, 4-CHOME, CHIYODA-KU,, TOKYO 101-8010, JPX, JAPAN

ADVANTEST CORPORATION

1-32-1, ASAHI-CHO, NERIMA-KU,, TOKYO,, JPX, JAPAN

Covered Property (1)

Exposure Apparatus, Control Method Thereof, and Device Manufacturing Method

Application: 10/329,388 →