Granted Patent
Utility
US 6,784,442
· Confirmation No. 9409
EXPOSURE APPARATUS, CONTROL METHOD THEREOF, AND DEVICE MANUFACTURING METHOD
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2009-04-10 | EBCC.AD |
Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update | 1 | View | |
| 2009-01-08 | EBCC.AD |
Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update | 1 | View | |
| 2004-07-12 | LET. |
Miscellaneous Incoming Letter | 5 | View | |
| 2004-07-12 | LET. |
Miscellaneous Incoming Letter | 6 | View | |
| 2004-04-02 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2004-04-02 | OATH |
Oath or Declaration filed | 7 | View | |
| 2004-01-21 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2003-12-17 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 3 | View | |
| 2003-12-17 | LET. |
Miscellaneous Incoming Letter | 3 | View | |
| 2002-12-27 | TRNA |
Transmittal of New Application | 2 | View | |
| 2002-12-27 | ADS |
Application Data Sheet | 2 | View | |
| 2002-12-27 | SPEC |
Specification | 22 | View | |
| 2002-12-27 | CLM |
Claims | 4 | View | |
| 2002-12-27 | ABST |
Abstract | 1 | View | |
| 2002-12-27 | DRW |
Drawings-only black and white line drawings | 12 | View | |
| 2002-12-27 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Attorneys & Agents of Record
Classification
USPC
250/492.2
H01J37/3174
B82Y10/00
B82Y40/00
H01J37/3177
H01J2237/30472
Prosecution
- Examiner
- GILL, ERIN-MICHAEL
- Art Unit
- 2881
- Customer No.
- 5514
- Docket No.
- 00862.022842.
- Confirmation No.
- 9409
Foreign Priority
2001-401639
·
2001-12-28
·
JAPAN
Publication
- Pub. No.
- US20030122087A1
- Pub. Date
- 2003-07-03
Patent Term Adjustment
0days
No related applications found.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2016-12-12
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-12-26
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Quick Facts
- Patent No.
- US 6,784,442
- App. No.
- 10/329,388
- Filed
- 2002-12-27
- Granted
- 2004-08-31
- Pub. No.
- US20030122087A1
- Examiner
- GILL, ERIN-MICHAEL
- Art Unit
- 2881
- PTA
- 0 days
External Links