IP Library Granted Patent US 6,784,442
Granted Patent Utility
US 6,784,442 · Confirmation No. 9409

EXPOSURE APPARATUS, CONTROL METHOD THEREOF, AND DEVICE MANUFACTURING METHOD

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2009-04-10 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2009-01-08 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2004-07-12 LET. Miscellaneous Incoming Letter 5 View
2004-07-12 LET. Miscellaneous Incoming Letter 6 View
2004-04-02 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-04-02 OATH Oath or Declaration filed 7 View
2004-01-21 IFEE Issue Fee Payment (PTO-85B) 1 View
2003-12-17 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2003-12-17 LET. Miscellaneous Incoming Letter 3 View
2002-12-27 TRNA Transmittal of New Application 2 View
2002-12-27 ADS Application Data Sheet 2 View
2002-12-27 SPEC Specification 22 View
2002-12-27 CLM Claims 4 View
2002-12-27 ABST Abstract 1 View
2002-12-27 DRW Drawings-only black and white line drawings 12 View
2002-12-27 OATH Oath or Declaration filed 2 View
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Quick Facts
Patent No.
US 6,784,442
App. No.
10/329,388
Filed
2002-12-27
Granted
2004-08-31
Pub. No.
US20030122087A1
Art Unit
2881
PTA
0 days