Patent Assignment
Reel/Frame 013626/0616
Assignment of Assignor's Interest
Recorded: 2003-01-02
Pages: 6
Assignee
SEMEQUIP, INC.
34 SULLIVAN ROAD, UNIT #21, BILLERICA, MASSACHUSETTS, 01862
Covered Property
(1)
Ion Implantation Ion Source, System and Method
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.