Patent Assignment
Reel/Frame 013628/0813
Confirmatory License
Recorded: 2003-01-03
Received: 2003-01-08
Pages: 3
Assignor
SANDIA CORPORATION
Executed: 2002-09-26
Assignee
ENERGY, U.S. DEPARTMENT OF
1000 INDEPENDENCE AVENUE, S.W., WASHINGTON, DC, 20585-0162, UNITED STATES
Covered Property
(1)
Method for Providing an Arbitrary Three-Dimensional Microstructure in Silicon Using an Anisotropic Deep Etch
Application:
10/146,421 →