IP Library › Granted Patent US 6,749,997
Granted Patent Utility
US 6,749,997 · Confirmation No. 7400

METHOD FOR PROVIDING AN ARBITRARY THREE-DIMENSIONAL MICROSTRUCTURE IN SILICON USING AN ANISOTROPIC DEEP ETCH

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2004-03-15 LET. Miscellaneous Incoming Letter 2 View
2004-03-15 DRW Drawings-only black and white line drawings 5 View
2004-03-15 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-02-17 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-02-17 NOA Notice of Allowance and Fees Due (PTOL-85) 5 View
2004-02-17 EXIN Examiner Interview Summary Record (PTOL - 413) 2 View
2004-02-17 1449 List of References cited by applicant and considered by examiner 1 View
2004-02-17 892 List of references cited by examiner 1 View
2004-02-17 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-02-17 FWCLM Index of Claims 1 View
2004-02-17 SRFW Search information including classification, databases and other search related notes 1 View
2004-01-16 SRNT Examiner's search strategy and results 12 View
2003-12-22 ELC. Response to Election / Restriction Filed 2 View
2003-12-12 CTRS Requirement for Restriction/Election 5 View
2002-10-07 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2002-08-26 LET. Miscellaneous Incoming Letter 5 View
2002-08-26 OATH Oath or Declaration filed 4 View
2002-06-25 CTMS Miscellaneous Action with shortened statutory period (SSP) 2 View
2002-05-14 TRNA Transmittal of New Application 2 View
2002-05-14 SPEC Specification 16 View
2002-05-14 CLM Claims 5 View
2002-05-14 ABST Abstract 1 View
2002-05-14 DRW Drawings-only black and white line drawings 5 View
2002-05-14 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2002-05-14 SRFW Search information including classification, databases and other search related notes 1 View
2002-05-14 FWCLM Index of Claims 1 View
2002-05-14 TRNA Transmittal of New Application 2 View
2002-05-14 DRW Drawings-only black and white line drawings 5 View
2002-05-14 SPEC Specification 16 View
2002-05-14 CLM Claims 5 View
2002-05-14 ABST Abstract 1 View
2002-05-14 WFEE Fee Worksheet (SB06) 1 View
2002-05-14 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
Patent No.
US 6,749,997
App. No.
10/146,421
Filed
2002-05-14
Granted
2004-06-15
Pub. No.
US20030215664A1
Art Unit
1756
PTA
-93 days