Assignment of Assignor's Interest

Recorded: 2003-01-07 Received: 2003-01-10 Pages: 2

Assignors

KATAGIRI, SOUICHI

Executed: 2001-04-23

KAWAMURA, YOSHIO

Executed: 2001-04-23

NAGASAWA, MASAYUKI

Executed: 2001-04-23

YAMAGUCHI, UI

Executed: 2001-04-23

YASUI, KAN

Executed: 2001-04-23

Assignee

HITACHI, LTD.

6, KANDA SURUGADAI 4-CHOME, CHIYODA-KU, TOKYO, JPX, JAPAN

Covered Property (1)

Method and Apparatus for Planarizing Semiconductor Device

Application: 09/863,264 →