Patent Application
Utility
App. No. 09/863,264
· Confirmation No. 9025
METHOD AND APPARATUS FOR PLANARIZING SEMICONDUCTOR DEVICE
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-05-24 | TRNA |
Transmittal of New Application | 2 | View | |
| 2001-05-24 | SPEC |
Specification | 19 | View | |
| 2001-05-24 | CLM |
Claims | 5 | View | |
| 2001-05-24 | ABST |
Abstract | 1 | View | |
| 2001-05-24 | DRW |
Drawings-only black and white line drawings | 4 | View | |
| 2001-05-24 | OATH |
Oath or Declaration filed | 4 | View |
Inventors
Souichi Katagiri
Kodaira, JAPAN
Yoshio Kawamura
Kokubunji, JAPAN
Kan Yasui
Kodaira, JAPAN
Masayuki Nagasawa
Kawagoe, JAPAN
Ui Yamaguchi
Urawa, JAPAN
Attorneys & Agents of Record
Classification
USPC
451/41
H10P52/00
B24B37/30
B24B37/042
B24B37/32
Prosecution
- Examiner
- MORGAN, EILEEN P
- Art Unit
- 3723
- Customer No.
- 24956
- Docket No.
- ASA-1002
- Confirmation No.
- 9025
Foreign Priority
2000-161125
·
2000-05-26
·
JAPAN
Publication
- Pub. No.
- US20020049026A1
- Pub. Date
- 2002-04-25
Patent Term Adjustment
0days
No related applications found.
MERGER AND CHANGE OF NAME
Recorded 2011-05-17
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2003-01-07
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Quick Facts
- App. No.
- 09/863,264
- Filed
- 2001-05-24
- Granted
- 2003-05-20
- Pub. No.
- US20020049026A1
- Examiner
- MORGAN, EILEEN P
- Art Unit
- 3723
- PTA
- 0 days
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