Patent Assignment
Reel/Frame 013643/0310
Assignment of Assignor's Interest
Recorded: 2003-01-13
Pages: 3
Assignors
MATSUKI, NOBUO
Executed: 2002-12-09
HYODO, YASUYOSHI
Executed: 2002-12-09
YAMAGUCHI, MASASHI
Executed: 2002-12-09
MORISADA, YOSHINORI
Executed: 2002-12-09
FUKAZAWA, ATSUKI
Executed: 2002-12-09
KATO, MANABU
Executed: 2002-12-09
Assignee
ASM JAPAN K.K.
23-1, 6-CHOME, NAGAYAMA-TAMA-SHI, TOKYO 206-0025, JAPAN
Covered Property
(1)
Insulation Film on Semiconductor Substrate and Method for Forming Same