Patent Assignment
Reel/Frame 013644/0839
Assignment of Assignor's Interest
Recorded: 2003-01-08
Pages: 3
Assignor
LENZ, ERIC H.
Executed: 2002-11-07
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Methods for Etching Dielectric Materials