Patent Assignment
Reel/Frame 013649/0988
Assignment of Assignor's Interest
Recorded: 2002-10-24
Pages: 3
Assignees
SEM TECHNOLOGY CO., LTD.
5TH FLOOR, DONGKOONG TOWN BUILDING, 91-2, CHONGDAM-DONG, KANGMAN-KU, SEOUL, 135-100, KOREA, REPUBLIC OF
LEE, HAG-JOO
#104-507 HYUNDAI APARTMENT, DOWHA 1-DONG, MAPO-KU,, SEOUL, 121-041, KOREA, REPUBLIC OF
Covered Property
(1)
Apparatus for Treating the Surface with Neutral Particle Beams