Patent Assignment
Reel/Frame 013658/0096
Assignment of Assignor's Interest
Recorded: 2003-01-13
Pages: 4
Assignor
YAHIRO, TAKEHISA
Executed: 2002-12-11
Assignee
NIKON CORPORATION
2-3 MARUNOUCHI 3-CHOME CHIYODA-KU, TOKYO 100-8331, JAPAN
Covered Property
(1)
Methods and Devices for Evaluating Imaging Characteristics of a Charged-Particle-Beam Microlithography System