Patent Assignment
Reel/Frame 013660/0365
Assignment of Assignor's Interest
Recorded: 2003-01-09
Pages: 3
Assignors
WANG, MING-YI
Executed: 2002-12-06
TSAY, JENG-YEN
Executed: 2002-12-06
CHUANG, JENG-CHIANG
Executed: 2002-12-06
TSAI, CHON-YAI
Executed: 2002-12-06
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO. LTD.
NO. 121 PARK AVENUE 3, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, R.O.C., TAIWAN
Covered Property
(1)
Convex Insert Ring for Etch Chamber