Patent Assignment
Reel/Frame 013660/0778
Assignment of Assignor's Interest
Recorded: 2003-01-14
Received: 2003-01-21
Pages: 3
Assignee
INFINEON TECHNOLOGIES AG
PATENTABTEILUNG RIDLERSTRASSE 55 D-80339, MUNCHEN, DEX, GERMANY
Covered Property
(1)
Configuration for the Execution of a Plasma Based Sputter Process
Application:
09/832,988 →