IP Library Granted Patent US 6,524,448
Granted Patent Utility
US 6,524,448 · Confirmation No. 9497

CONFIGURATION FOR THE EXECUTION OF A PLASMA BASED SPUTTER PROCESS

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Code Description Pages PDF
2001-05-29 TRNA Transmittal of New Application 2 View
2001-05-29 SPEC Specification 15 View
2001-05-29 CLM Claims 3 View
2001-05-29 ABST Abstract 2 View
2001-04-11 TRNA Transmittal of New Application 1 View
2001-04-11 SPEC Specification 18 View
2001-04-11 DRW Drawings-only black and white line drawings 6 View
2001-04-11 OATH Oath or Declaration filed 2 View
2001-04-11 LET. Miscellaneous Incoming Letter 1 View
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Quick Facts
Patent No.
US 6,524,448
App. No.
09/832,988
Filed
2001-04-11
Granted
2003-02-25
Pub. No.
US20020036132A1
Art Unit
1753
PTA
-112 days