Patent Assignment
Reel/Frame 013661/0682
Assignment of Assignor's Interest
Recorded: 2003-01-09
Pages: 3
Assignors
LEI, MING-TA
Executed: 2002-12-10
LIN, YIH-SHUNG
Executed: 2002-12-10
LIU, AI-SEN
Executed: 2002-12-10
LIN, CHENG-CHUNG
Executed: 2002-12-10
PERNG, BAW-CHING
Executed: 2002-12-10
LIN, CHIA-HUI
Executed: 2002-12-10
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 121 PARK AVENUE 3, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, R.O.C., TAIWAN
Covered Property
(1)
Method for Forming Multiple Spacer Widths